Multimodal X-ray and Hyperspectral Thin-Film Nano-material Evaluation and Quality Imaging


 Start date: 1st March 2020
Duration of the project: 36 months


Functional performances of nano-materials and thin films with nano-scale thickness are determined not only by material selection but also by their nano-physical dimensions, nano-scale structure and their nano-scale chemical composition. Precise characterisation of these properties is critical to develop new functional nano-materials and optimise processes toward higher performance, improved reproducibility and yield and up-scaling to larger quantities. X-ray characterisation techniques such as X-ray diffraction analysis (XRD) or X-ray reflectometry (XRR) are widely used in research laboratories for this task but are rarely used in industrial material development and assessment of production processes due to technical limitations and required high level expertise. The project NanoQI targets the development of an industry-suited, real-time and in-line capable technique to characterise nano-structure and nano-dimensions of (thin-film) nano-materials by optimisation of area-detectorbased XRR and XRD concepts and their multi-modal combination with a novel wide-angle hyper-spectral imaging (HSI) technique. Therewith, NanoQI will provide industry access to real time evaluation of nano-material geometry, structure and morphology and correlative imaging of deviations of these properties. NanoQI technology will be demonstrated in three relevant industrial application scenarios: in-situ process assessment in manufacturing of perovskite solar cells; large-area vacuum roll-to-roll coating of polymer webs and industrial atomic layer deposition of dielectric and gas barrier layers.

 #  Participant organisation name  Short name  Country  Nature
1  Fraunhofer Gesellschaft e.V. / Institutes: FEP, IAP, IWS  FhG  DE  REC
2  Bruker AXS GmbH  BAXS  DE  IND
3  SMIT Thermal Solutions B. V.  SMIT  NL  IND
4  Netherlands Organisation for Applied Scientific Research  TNO  NL  REC
5  Technical University of Dortmund  TUDO  DE  HES
6  Nordmeccanica SA  NORD  IT  IND
7  Norsk Elektro Optikk AS / HySpex Division  NEO  NO  SME
8  AMIRES s.r.o.  AMI  CZ  SME

 Name  Dr. John Fahlteich
 Organisation  Fraunhofer Institute for Electron Beam and Plasma Technology
 Phone  +49 351 2586-136

This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 862055, project NanoQI.